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Fault detection method for batch process based on deep long short-term memory network and batch normalization
WANG Shuo, WANG Peiliang
Journal of Computer Applications
2019, 39 (2):
370-375.
DOI: 10.11772/j.issn.1001-9081.2018061371
Traditional fault detection methods for batch process based on data-driven often need to make assumptions about the distribution of process data, and often lead to false positives and false negatives when dealing with non-linear data and other complex data. To solve this problem, a supervised learning algorithm based on Long Short-Term Memory (LSTM) network and Batch Normalization (BN) was proposed, which does not need to make assumptions about the distribution of original data. Firstly, a preprocessing method based on variable-wise unfolding and continuous sampling was applied to the batch process raw data, so that the processed data could be input to the LSTM unit. Then, the improved deep LSTM network was used for feature learning. By adding the BN layer and the representation method of cross entropy loss, the network was able to effectively extract the characteristics of the batch process data and learned quickly. Finally, a simulation experiment was performed on a semiconductor etching process. The experimental results show that compared with Multilinear Principal Component Analysis (MPCA) method, the proposed method can identify more faults types, which can effectively identify various faults, and the overall detection rate of faults reaches more than 95%. Compared with the traditional single-LSTM model, it has higher recognition speed, and its overall detection rate of faults is increased by more than 8%, and it is suitable for dealing with fault detection problems with non-linear and multi-case characteristics in the batch process.
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